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Effect of Hydrogen-Ion-Implantation on Self-Separation of Free-Standing Gallium Nitride Wafers Grown By Hvpe

  • 박재근
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Effect of Hydrogen-Ion-Implantation on Self-Separation of Free-Standing Gallium Nitride Wafers Grown By Hvpe
저자
박재근
발행일
2019-05-28
학회명
235th ECS Meeting

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