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Comprehensive Studies of Atomic Layer Deposited InGaO Thin Films using InCA-1, TMGa and H2O2 for Oxide Semiconductor Thin Film Transistor Applications
- 제목
- Comprehensive Studies of Atomic Layer Deposited InGaO Thin Films using InCA-1, TMGa and H2O2 for Oxide Semiconductor Thin Film Transistor Applications
- 저자
- 박진성
- 발행일
- 2017-07-18
- 학회명
- 17th International Conference on Atomic Layer Deposition
- 개최지
- USA, Colorado, Denver