Structural and electrical characteristics of ultra thin HfO2 gate oxide prepared by inductively couled rf magnetron sputtering system

초록

제목
Structural and electrical characteristics of ultra thin HfO2 gate oxide prepared by inductively couled rf magnetron sputtering system
저자
홍진표
발행일
2003-12-11
학회명
The 3rd international conference on advanced materials and devices
개최지
제주도 라마다호텔