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Characteristics of Al2O3 Films Depositied by Atomic Layer Deposition Method Using Various Oxidants

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Characteristics of Al2O3 Films Depositied by Atomic Layer Deposition Method Using Various Oxidants
저자
전형탁
발행일
2003-12-02
학회명
2003 MRS Fall Meeting
개최지
Hynes Convention Center and Sheraton Boston HotelBoston,U.S.A

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