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Effect of Characteristics of Nano-Colloidal Silica Abrasives on Wafer Surface Roughness for Wafer Touch Polishing
- 제목
- Effect of Characteristics of Nano-Colloidal Silica Abrasives on Wafer Surface Roughness for Wafer Touch Polishing
- 저자
- 백운규
- 발행일
- 2005-06-09
- 학회명
- China Nano 2005
- 개최지
- 중국 베이징