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Nanotopography Impact of Surfactant Concentration and Molecular Weight of Nano-ceria Slurry on Oxide Removal Rate and Remaining Oxide Thickness Variation after STI CMP

  • 박재근
제목
Nanotopography Impact of Surfactant Concentration and Molecular Weight of Nano-ceria Slurry on Oxide Removal Rate and Remaining Oxide Thickness Variation after STI CMP
저자
박재근
발행일
2006-11-03
학회명
ECS-2006 Joint International Meeting
개최지
Mexico

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