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Effective Oxidation Methods in Improving Surface Roughness to Form Relaxed SiGe Layer-on-insulator Substrate

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Effective Oxidation Methods in Improving Surface Roughness to Form Relaxed SiGe Layer-on-insulator Substrate
저자
박재근
발행일
2010-04-23
학회명
2010년 한국물리학회 봄 학술논문발표회 및 제 86회 정기총회
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대전컨벤션센터

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