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Effects of hydrogen pretreatments on the substrate surface for the nucleation sites of polycrystalline silicon films
- 제목
- Effects of hydrogen pretreatments on the substrate surface for the nucleation sites of polycrystalline silicon films
- 저자
- 남창우
- 발행일
- 1999-04-24
- 학회명
- 1999년도 봄 학술논문 발표회