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A study on the properties of interlayer low dielectric polyimide during Cl-based plasma etching of aluminium
- 제목
- A study on the properties of interlayer low dielectric polyimide during Cl-based plasma etching of aluminium
- 저자
- 안진호
- 발행일
- 1999-07-07
- 학회명
- International Microprocess and Nanotechnology
- 개최지
- Yokohama