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Dependence of pH, Molecular Weight, and Concentration of Surfactant in Ceria Slurry on Saturated Nitride Removal Rate in STI CMP
- 제목
- Dependence of pH, Molecular Weight, and Concentration of Surfactant in Ceria Slurry on Saturated Nitride Removal Rate in STI CMP
- 저자
- 백운규
- 발행일
- 2005-04-22
- 학회명
- 한국물리학회
- 개최지
- 이화여자대학교