Study of charge collection in the wide range of operating pressure

초록

To investigate the collisional effects on charge collection, we measured some I-V characteristic curves in the wide range of plasma pressures. The plasma has been generated by using a 2.45GHz magnetron in a quartz tube of 36mm diameter. In the pressure range of several torr, ion density could be calculated with collisional thin sheath model in probe analysis but electron model was varied from collisionless to collisional region. For evaluation of plasma parameter from I-V characteristic curve in intermediate pressure (collision-collisional) region, it is better to get from log plot not from electron energy distribution function. Because low energy part of electron undergoes more collision than high energy electron in intermediate pressure.