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Permeation Barrier Property of Al2O3/ZrO2 Multilayer Deposited by Remote Plasma Atomic Layer Deposition

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제목
Permeation Barrier Property of Al2O3/ZrO2 Multilayer Deposited by Remote Plasma Atomic Layer Deposition
저자
전형탁
발행일
2013-04-04
학회명
2013 MRS Spring meeting
개최지
미국

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