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- 제목
- Effect of Compositional Variations on the Barrier Characteristic of TiAlN films Deposited by Metal Organic Atomic Layer Deposition(MOALD) Method
- 저자
- 김영도
- 발행일
- 2001-07-19
- 학회명
- The Fourth joint Symposium on Electronic Materials
- 개최지
- Paros Hotel, Yangpyung