상세 보기
Enhanced contact resistance between ALD-Ru and W by oxygen removal using forming gas annealing
- 제목
- Enhanced contact resistance between ALD-Ru and W by oxygen removal using forming gas annealing
- 저자
- 안진호
- 발행일
- 2025-01-16
- 학회명
- nano convergence conference 2025
- 개최지
- 대전