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Surface Smoothness Enhancement of Atomic Layer Deopsited HfO2 Film via Inserting Al2O3 Thin Film with Layer-by-layer
- 제목
- Surface Smoothness Enhancement of Atomic Layer Deopsited HfO2 Film via Inserting Al2O3 Thin Film with Layer-by-layer
- 저자
- 안진호
- 발행일
- 2016-10-17
- 학회명
- The 3rd International Confernece on ALD Applications 2016 China Atomic Layer Deposition
- 개최지
- 중국 Suzhou