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Interpretation of the asymmetric color and shape of brownish ring in quartz crucible
- Jung, Yoon Sung;
- Choi, Jae Ho;
- Min, Kyung Won;
- Byun, Young Min;
- Im, Won Bin;
- 외 1명
초록
Brownish rings (BRs) with white interiors are formed during the manufacture of silicon ingots in quartz glass crucibles. These BRs inhibit the yield of silicon ingots. However, the composition and mechanism of the formation of these BRs remain unclear thus far. Therefore, in this study, we analyzed the color and shape of these BRs. Raman analysis revealed that the brown and white colors appear owing to oxygen deficiency rather than crystallization from excess oxygen supply as previously assumed. Moreover, the dark shade of the brown areas depends on the degree of oxygen deficiency and the asymmetrical width of the brown areas is attributed to the direction of the molten silicon flow, which is influenced by the rotation and heat of the ingot crucible.
키워드
- 제목
- Interpretation of the asymmetric color and shape of brownish ring in quartz crucible
- 제목 (타언어)
- 쿼츠도가니 표면에 발생하는 Brownish ring의 비대칭 color와 형상에 대한 해석
- 저자
- Jung, Yoon Sung; Choi, Jae Ho; Min, Kyung Won; Byun, Young Min; Im, Won Bin; Kim, Hyeong-Jun
- 발행일
- 2022-12
- 저널명
- 반도체디스플레이기술학회지
- 권
- 21
- 호
- 4
- 페이지
- 50 ~ 52