Vertical Pi(Φ)gate structure for improved transistor operation of 3D NAND flash memory structures

제목
Vertical Pi(Φ)gate structure for improved transistor operation of 3D NAND flash memory structures
저자
이승백
발행일
2010-07-29
학회명
30th International Conference on the Physics of Semiconductors(ICPS2010)
개최지
서울