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Atomic Layer Deposition of Zirconium Oxide and Hafnium Oxide from Novel Metal-Organic Precursors

  • 구상만
제목
Atomic Layer Deposition of Zirconium Oxide and Hafnium Oxide from Novel Metal-Organic Precursors
저자
구상만
발행일
2004-04-13
학회명
2004 MRS Spring Meeting
개최지
San Fransisco, CA, USA

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