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Theoretical Prediction of Optical Performance of Ru and Si Capped Reflectors for Extreme Ulrtaviolet Lithography(EUVL)
- 제목
- Theoretical Prediction of Optical Performance of Ru and Si Capped Reflectors for Extreme Ulrtaviolet Lithography(EUVL)
- 저자
- 안진호
- 발행일
- 2006-05-30
- 학회명
- The 50th international conference on electron, ion and Photon beam technology and nanofabrication(EI
- 개최지
- Baltimore, Maryland