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Negative electron-beam resist hard mask ion beam etching process for the fabrication of nanoscale spin transfer torque magnetic random access memory device
- 제목
- Negative electron-beam resist hard mask ion beam etching process for the fabrication of nanoscale spin transfer torque magnetic random access memory device
- 저자
- 이승백
- 발행일
- 2012-07-12
- 학회명
- International Conference on Magnetism
- 개최지
- Bexco, Busan, Korea