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Reduction of interface trap in poly-Si channel for 3D NAND device through dielectric recovery process

  • 김은규
제목
Reduction of interface trap in poly-Si channel for 3D NAND device through dielectric recovery process
저자
김은규
발행일
2017-04-20
학회명
Materials Research Society 2017 Spring Meeting
개최지
Phoenix, Arizona

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