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Nitrogen MeV-ion-induced extended defects and the pile-up of interstitial oxygen in Si wafers

  • 박재근
제목
Nitrogen MeV-ion-induced extended defects and the pile-up of interstitial oxygen in Si wafers
저자
박재근
발행일
2000-03-30
학회명
일본응용물리학회 2000년 춘계분과회

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