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The Effect of Physical Chracteristics of Cerium Oxide in Nanotophography of Chemical Mechanical Polishing for Shallow Trench Isolation

  • 박재근
제목
The Effect of Physical Chracteristics of Cerium Oxide in Nanotophography of Chemical Mechanical Polishing for Shallow Trench Isolation
저자
박재근
발행일
2003-04-18
학회명
2003 spring meeting of Korean Ceramic Society
개최지
Korea

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