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Amorphous Indium Zinc Tin Oxide (IZTO) Semiconductor Materials and the Associated Thin Film Transistor Properties Deposited by Atomic Layer Deposition
- 제목
- Amorphous Indium Zinc Tin Oxide (IZTO) Semiconductor Materials and the Associated Thin Film Transistor Properties Deposited by Atomic Layer Deposition
- 저자
- 박진성
- 발행일
- 2018-08-01
- 학회명
- 18th International Conference on Atomic Layer Deposition and Atomic Layer Etching
- 개최지
- 대한민국 인천 송도