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Effect of Abrasive Material Properties on Polishing Rate Selectivity of Nitrogen-doped Ge2Sb2Te5 to SiO2 Film in Chemical Mechanical Polishing

  • 박재근
제목
Effect of Abrasive Material Properties on Polishing Rate Selectivity of Nitrogen-doped Ge2Sb2Te5 to SiO2 Film in Chemical Mechanical Polishing
저자
박재근
발행일
2009-04-15
학회명
2009 MRS Spring Meeting
개최지
San Fransisco, CA

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