상세 보기
Characteristics of hybrid mask mold for combined nanoimprint and photolithography technique
- 제목
- Characteristics of hybrid mask mold for combined nanoimprint and photolithography technique
- 저자
- 안진호
- 발행일
- 2005-10-13
- 학회명
- 2005 Korea-japan Joint Workshop
- 개최지
- 용평