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The Growth Behavior and Film Properties of Conductive ALD SnOx Using TDMASn and Hydrogen Peroxide
- 제목
- The Growth Behavior and Film Properties of Conductive ALD SnOx Using TDMASn and Hydrogen Peroxide
- 저자
- 박진성
- 발행일
- 2013-07-30
- 학회명
- 13th International Confernece on Atomic Layer Deposition
- 개최지
- San diego, California