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Reduction of Trap Density for Thermal-ALD-Deposited ZrO2 High-k Insulators by Deposition Process Modulation and High-Pressure Annealing
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- Reduction of Trap Density for Thermal-ALD-Deposited ZrO2 High-k Insulators by Deposition Process Modulation and High-Pressure Annealing
- 저자
- 박진성
- 발행일
- 2024-08-21
- 학회명
- IMID 2024
- 개최지
- ICC Jeju, Jeju, Korea