ScholarWorks@한양대학교

상세 보기

Si3N4 Film Passivation by PAA adlayer in STI CMP: Role of PAA Conformation

제목
Si3N4 Film Passivation by PAA adlayer in STI CMP: Role of PAA Conformation
저자
백운규
발행일
2009-04-15
학회명
2009 MRS spring meeting
개최지
San Francisco, USA

ScholarWorks@한양대학교

(04763) 서울특별시 성동구 왕십리로 222 Tel. +82-2-2220-1370 +82-2-2220-1366

COPYRIGHT © 한양대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.