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Improvement of SRAF application margin and imaging performance of isolated patterns by using attenuated phase shift mask
- 제목
- Improvement of SRAF application margin and imaging performance of isolated patterns by using attenuated phase shift mask
- 저자
- 안진호
- 발행일
- 2016-10-24
- 학회명
- 2016 EUVL symposium
- 개최지
- 일본 히로시마