Low Temperature Atomic Layer Deposited SiO2 Films Using Various Oxygen Reactants Plasma for Flexible Thin Film Encapsulation

제목
Low Temperature Atomic Layer Deposited SiO2 Films Using Various Oxygen Reactants Plasma for Flexible Thin Film Encapsulation
저자
박진성
발행일
2019-08-29
학회명
International Meeting on Information Display (IMID) 2019
개최지
HICO, Gyeongju, Korea