Chemical Stable, Defect Suppression of Amorphous Sn-doped Indium Zinc Oxide (IZTO) Semiconductor Materials for Thin Film Transistor without Etch-stop Layer

제목
Chemical Stable, Defect Suppression of Amorphous Sn-doped Indium Zinc Oxide (IZTO) Semiconductor Materials for Thin Film Transistor without Etch-stop Layer
저자
박진성
발행일
2018-10-15
학회명
The 4th International Conference on ALD Applications & 2018 China ALD Conference
개최지
Shenzhen, china