상세 보기
Chemical Stable, Defect Suppression of Amorphous Sn-doped Indium Zinc Oxide (IZTO) Semiconductor Materials for Thin Film Transistor without Etch-stop Layer
- 제목
- Chemical Stable, Defect Suppression of Amorphous Sn-doped Indium Zinc Oxide (IZTO) Semiconductor Materials for Thin Film Transistor without Etch-stop Layer
- 저자
- 박진성
- 발행일
- 2018-10-15
- 학회명
- The 4th International Conference on ALD Applications & 2018 China ALD Conference
- 개최지
- Shenzhen, china