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Barrier Properties of Low-Temperature PEALD SiNₓ Films [PEALD] Using TSA and BTBAS Precursors

제목
Barrier Properties of Low-Temperature PEALD SiNₓ Films [PEALD] Using TSA and BTBAS Precursors
저자
박진성
발행일
2025-08-21
학회명
IMID2025
개최지
부산 벡스코

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