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Compositional Tailoring of In-free GZO layers by PEALD for Remarkably Stable IGZO/GZO Thin-Film Transistors
- 제목
- Compositional Tailoring of In-free GZO layers by PEALD for Remarkably Stable IGZO/GZO Thin-Film Transistors
- 저자
- 박진성
- 발행일
- 2023-08-23
- 학회명
- IMID 2023
- 개최지
- 부산 해운대