Compositional Tailoring of In-free GZO layers by PEALD for Remarkably Stable IGZO/GZO Thin-Film Transistors

제목
Compositional Tailoring of In-free GZO layers by PEALD for Remarkably Stable IGZO/GZO Thin-Film Transistors
저자
박진성
발행일
2023-08-23
학회명
IMID 2023
개최지
부산 해운대