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Transparent Al doped ZnO oxide thin film transistor deposited by low temperature atomic layer deposition
- 제목
- Transparent Al doped ZnO oxide thin film transistor deposited by low temperature atomic layer deposition
- 저자
- 박진성
- 발행일
- 2011-06-26
- 학회명
- 11th International Conference on Atomic Layer Deposition(ALD 2011)