Spark Plasma Sintering of ZnS-SiO2 for Sputtering Target

초록

ZnS-SiO2 powder was prepared by two kinds of mixing method which were simple mixing by 3-D mixer and high energy ball-milling. These powders were densified by spark plasma sintering process. In case of the ball-milled ZnS-SiO2 powder, the SiO2 phase was more homogeneously distributed compared with that of simple mixed powder. Vickers hardness of sintered part was measured by Vickers indentation with a load of 9.8 N and duration time of 10 s. Fracture toughness was determined by the indentation fracture method using a Vickers indenter. In the ball-milled powder, fracture toughness was higher than that of simple mixed powder.