상세 보기
- 제목
- 1-Step Tungsten Chemical–Mechanical Planarization Performing Remarkable High Tungsten Film Polishing-Rate and Reverse Polishing-Rate Selectivity between Tungsten-and SiO2-film via Radical Oxidation
- 저자
- 박재근
- 발행일
- 2023-11-22
- 학회명
- Korean international semiconductor conference on manufactureing technology 2023
- 개최지
- 부산