ScholarWorks@한양대학교

상세 보기

History of atomic layer deposition and its relationship with the American Vacuum Society (vol 31, 050818, 2013)

Parsons, Gregory N.;
Elam, Jeffrey W.;
George, Steven M.;
Haukka, Suvi;
Jeon, Hyeongtag;
외 5명

Citations

WEB OF SCIENCE

3

Citations

SCOPUS

2

제목: History of atomic layer deposition and its relationship with the American Vacuum Society (vol 31, 050818, 2013)

저자: Parsons, Gregory N.; Elam, Jeffrey W.; George, Steven M.; Haukka, Suvi; Jeon, Hyeongtag; (Erwin) Kessels, W. M. M.; Leskelae, Markku; Poodt, Paul; Ritala, Mikko; Rossnagel, Steven M.

DOI: 10.1116/6.0000143

발행일: 2020-05

유형: Correction

저널명: Journal of Vacuum Science and Technology A

권: 38

호: 3

페이지: 1 ~ 1