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Enhanced adhesion of RF bias sputtered NiMoNb layer on polyimide substrate treated by Ar plasma

  • 김영호
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Enhanced adhesion of RF bias sputtered NiMoNb layer on polyimide substrate treated by Ar plasma
저자
김영호
발행일
2015-10-15
학회명
The 14th International Symposium on Microelectronics and Packaging
개최지
KINTEX, Seoul / Ilsan, Korea

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