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Study on Epitaxial Process for Dislocation Free SiGe Layer by Ultra-high-vacuum CVD

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Study on Epitaxial Process for Dislocation Free SiGe Layer by Ultra-high-vacuum CVD
저자
박재근
발행일
2022-06-15
학회명
13th International Symposium for Advanced Functional Materials & Devices
개최지
강원도 홍천 소노벨 비발디 파크

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