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EFFECT OF IMPLANTATION DOSE AND EXIMER LASER ANNEALING ENERGY ON CRYSTAL DEFECT IN PLASMA IMMERSION ION IMPLANTATION

  • 박재근
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EFFECT OF IMPLANTATION DOSE AND EXIMER LASER ANNEALING ENERGY ON CRYSTAL DEFECT IN PLASMA IMMERSION ION IMPLANTATION
저자
박재근
발행일
2003-04-25
학회명
춘계 한국물리학회
개최지
연세대학교

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