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Characteristics of TiAlN and TiN/Al Multilayer Thin Films Deposited by Metal Organic Atomic Layer Deposition (MOALD) Method

  • 김영도
제목
Characteristics of TiAlN and TiN/Al Multilayer Thin Films Deposited by Metal Organic Atomic Layer Deposition (MOALD) Method
저자
김영도
발행일
2001-07-19
학회명
The Fourth joint Symposium on Electronic Materials
개최지
Paros Hotel, Yangpyung

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