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Investigation of Discrete Reactant Feeding for Atomic Layer Deposition of In2O3 Using Novel Liquid Alkyl-Cyclopentadienyl Indium Precursor.
- 제목
- Investigation of Discrete Reactant Feeding for Atomic Layer Deposition of In2O3 Using Novel Liquid Alkyl-Cyclopentadienyl Indium Precursor.
- 저자
- 박진성
- 발행일
- 2023-07-24
- 학회명
- ALD 2023
- 개최지
- Los angeles