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The Resistive Switching Characteristics of Nanocrystalline HfO2 Films Grown by Fast Atomic Layer Deposition with La(NO3)36H20 Solution
- 제목
- The Resistive Switching Characteristics of Nanocrystalline HfO2 Films Grown by Fast Atomic Layer Deposition with La(NO3)36H20 Solution
- 저자
- 안진호
- 발행일
- 2017-11-28
- 학회명
- 2017 MRS Fall Meeting & Exhibit
- 개최지
- Boston, Massachusetts, USA