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Diffracted moire fringes as analysis and alignment tools for multilayer fabrication in soft lithography
초록
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- 제목
- Diffracted moire fringes as analysis and alignment tools for multilayer fabrication in soft lithography
- 저자
- 오차환
- 발행일
- 2005-11-06
- 학회명
- The 3rd international symposium on advanced photonic science and technology
- 개최지
- Shanghai, China