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Effect of NH3 Plasma Treatments on Deposition of Nickel Film by Chemical Vapor Deposition

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Effect of NH3 Plasma Treatments on Deposition of Nickel Film by Chemical Vapor Deposition
저자
전형탁
발행일
2014-02-26
학회명
제21회 한국반도체학술대회
개최지
한양대학교

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