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Effects Non-prestonian behavior of ceria slurry with anionic surfactant on abrasive concentration and size in shallow trench isolation chemical mechanical polishing
- 제목
- Effects Non-prestonian behavior of ceria slurry with anionic surfactant on abrasive concentration and size in shallow trench isolation chemical mechanical polishing
- 저자
- 백운규
- 발행일
- 2006-05-19
- 학회명
- 2006년 춘계 한국재료학회
- 개최지
- 경상대학교