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Deposition of low strss,High transmittance SiC as an x-ray mask membrane using ECR plasma CVD

제목
Deposition of low strss,High transmittance SiC as an x-ray mask membrane using ECR plasma CVD
저자
안진호
발행일
1998-02-01
학회명
제5회 한국반도체학술대회

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