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The Effect of the Interaction Forces Between CeO2 and SiO2 on the Step Height Reduction During STI CMP
- 제목
- The Effect of the Interaction Forces Between CeO2 and SiO2 on the Step Height Reduction During STI CMP
- 저자
- 백운규
- 발행일
- 2015-09-03
- 학회명
- The 11th Pacific Rim Conference of Ceramic Societies
- 개최지
- Icc jeju, Korea