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Fabrication of high aspect ratio nanoscale magnetic tunnel junction etch mask by oxygen plasma assisted resist trimming
- 제목
- Fabrication of high aspect ratio nanoscale magnetic tunnel junction etch mask by oxygen plasma assisted resist trimming
- 저자
- 이승백
- 발행일
- 2012-07-13
- 학회명
- International Conference on Magnetism
- 개최지
- Bexco, Busan, Korea